General discussion in the metrology field tends to revolve around the relative merits of non-contact or contact measurement solutions. However, demand now exists in almost every industry for more ...

Stacking chips is making it far more difficult to find existing and latent defects, and to check for things like die shift, leftover particles from other processes, co-planarity of bumps, and adhesion ...

University of Illinois Physics Professor Paul Kwiat and members of his research group have developed a new tool for precision measurement at the nanometer scale in scenarios where background noise and ...