Atomic vacancies are a type of point defect in a crystal lattice where one or more atoms are absent from their regular lattice positions. Although they might seem like simple imperfections, these ...

Researchers and industries have been using transmission electron microscopy (TEM) to study semiconductors' stacking and dislocation faults. This article considers the analysis of crystal structures.

AI plays a role in improving defect capture rate and distinguishing between yield-killing and nuisance defects. New developments in wafer edge inspection are proving essential to bonded wafer yields.