An unsatisfying compromise has to be made between acceptable throughput and sufficient data coverage when measuring high-slope machined parts, since metrology tools usually involve some sort of ...

Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is essential for semiconductor inspection in fields like microelectromechanical systems (MEMS) and ...

Surface metrology has to increasingly deal with the presence of sub-micron thick films, which are now being used on products well beyond semiconductor devices. Sub-micron films may be incidental – for ...

(Nanowerk News) Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and ...

A technique called plasmonic interferometry helps to detect spatial coherence in 'incoherent' light. A technique called plasmonic interferometry helps to detect spatial coherence in 'incoherent' light ...