Abstract: In sub-28-nm nodes, existing optical critical dimension (OCD) metrology tools are challenging to simultaneously and thoroughly meet the metrology requirements of the wafer-level ...
When you purchase through links on our site, we may earn an affiliate commission. Here’s how it works. In October 2024, news broke that Facebook parent company Meta had cracked an "impossible" problem ...
Abstract: One application of the compressive sensing (CS) technique in the method of moments involves restructuring matrix equations into a CS model to enhance computational efficiency. However, this ...
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