Abstract: The ever-increasing demand for affordable, compact, and integrated sensors necessitates innovations that outperform traditional, bulkier counterparts. This paper introduces an advanced ...
Abstract: An advanced micromachining process has been developed to further push the performance limits of mass-produced inertial MEMS. The main achievement of the new platform technology is the usage ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback